Valve helium mass spectrometry leak detection

Since gases used in the semiconductor industry, such as silane (SiH4), ammonia (NH3), etc., are all toxic or corrosive gases, the requirements for the leakage rate of the valves and related components used are extremely strict. It is required that the final leakage rate of the finished product is lower than 5-10 mbar l / s, and only the helium mass spectrometer leak detector can meet such a leakage rate requirement.

Demand for Valve Leak Detection

  The sealing performance of a valve is one of the main indicators for evaluating the quality of the valve. Therefore, when designing and manufacturing valves, their sealing performance should be improved, and the last process before leaving the factory should be to conduct a sealing performance test on the valves. Currently, many valve manufacturers in China use the water detection method and the air pressure method for airtightness detection. However, using these methods can only detect situations where the leak holes are relatively large, and generally the minimum detectable leakage rate is 1X10E-3 mbar l/s.

But with the continuous improvement of customers' requirements for product quality, the water detection method and the air pressure method can no longer meet the requirements. In order to ensure product competitiveness, many manufacturers have introduced helium leak detectors. Among the commonly used leak detection methods at present, the helium leak detection method is recognized as one of the most advanced and reliable methods.

  The helium mass spectrometer leak detector of Anhui Nuoyi Technology has the advantages of small size, light weight, internal modular design, convenient detection and maintenance, simple operation, one-touch operation, etc., and is favored by a large number of customers.

The helium leak detector can accurately determine whether there is a leak in the valve.

The advantages of the helium mass spectrometer leak detector for valves and its helium detection equipment lie in: high detection accuracy and low production cost.

More Application Cases of Helium Mass Spectrometer Leak Detectors >>

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