Analysis and Troubleshooting of Common Error Codes for NOY Helium Mass Spectrometer Leak Detectors

10

Excessive pump-down attempts during calibration with standard leak

1: Leak test port pressure cannot be pumped down; test port not properly connected or standard leak faulty.

2: V2 valve not opened or not fully opened.

1: Check for large leak at test port; inspect standard leak.

2: Check V2 valve.

16

Startup timeout

Turbomolecular pump cannot be powered on normally.

Check turbomolecular pump.

20

Anode high voltage error

Filament board detected anode voltage error in ion source.

Inspect anode power supply, ion source cable, and filament board.

21

Emission current too low

Filament board detected low emission current in ion source.

Press Stop key, then restart.

22

Emission current too high

Filament board detected high emission current in ion source.

Press Stop key, then restart.

23

Filament board 24V fault

Abnormal 24V voltage on filament board.

Inspect filament board.

24

80V voltage fault

Abnormal 80V voltage on filament board.

Inspect filament board.

26

Turbomolecular pump not ready

Turbomolecular pump startup not completed.

Check backing vacuum and evaluate turbomolecular pump status.

27

Turbomolecular pump communication fault

Main control board did not detect communication with turbomolecular pump.

Inspect communication lines and main control board.

36

Turbomolecular pump communication timeout

Main control board has not detected communication with turbomolecular pump for an extended period.

Inspect communication lines and main control board.

36

Turbomolecular pump speed too low

Turbomolecular pump speed has not reached normal operating speed.

Check turbomolecular pump power supply and connections.

37

Turbomolecular pump fault

Turbomolecular pump damaged or power supply abnormal.

Check turbomolecular pump power supply and connections.

38

Turbomolecular pump warning

Turbomolecular pump overheating.

Check if leak test port vacuum is too high.

39

Turbomolecular pump exhaust pressure high

Backing pump and vacuum line vacuum abnormal.

Check if mechanical pump is working and inspect vacuum lines.

40

Standby: turbomolecular pump exhaust pressure high

Backing pump and vacuum line vacuum abnormal during standby.

Check if mechanical pump is working and inspect vacuum lines.

1

Sniffer mode calibration: background value too low

Background value collected during calibration is too low.

Check if sniffer probe is clogged.

2

Sniffer mode calibration: signal value too low

Ambient helium background too high, or standard leak faulty, or filament aging.

Wait for ambient background to drop before recalibrating, or contact manufacturer.

3

Sniffer calibration abnormal

Ambient helium background too high, or standard leak faulty, or filament aging.

Wait for ambient background to drop before recalibrating, or contact manufacturer.

6

Turbomolecular pump exhaust abnormal during leak testing

Solenoid valve internal leak or poor vacuum at test port.

Check leak test port and connecting vacuum lines.

9

Large-leak protection

Sudden increase in vacuum at leak test port.

Check for abnormalities in vacuum lines at test port.

10

Pump-down timeout

Leak test port pressure cannot be pumped down.

Check if leak test port vacuum line is blocked.

11

Sniffer probe clogged

Check sniffer probe filter.

Check if leak test port pressure is abnormal.

12

Sniffer probe leak

Check if leak test port pressure is >300 Pa after entering leak detection mode.

Check if leak test port pressure is abnormal.